Depth resolution of the low- and high-deflection backscattered electron images in the scanning electron microscope
- 16 August 1976
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 36 (2) , 527-532
- https://doi.org/10.1002/pssa.2210360213
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Exit angle dependence of penetration depth of backscattered electrons in the scanning electron microscopePhysica Status Solidi (a), 1976
- Low-Loss Image for Surface Scanning Electron MicroscopeApplied Physics Letters, 1971
- Study on the Resolution of the Backscattered Electron Image by the Monte Carlo MethodJapanese Journal of Applied Physics, 1971
- NEW CONTRAST MECHANISM FOR SCANNING ELECTRON MICROSCOPEApplied Physics Letters, 1970
- Multiple scattering of 5 - 30 keV electrons in evaporated metal films III: Backscattering and absorptionBritish Journal of Applied Physics, 1965