Characteristics of piezoelectric ZnO films deposited by RF mode electron cyclotron resonance sputtering system
- 3 December 1992
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 28 (25) , 2315-2317
- https://doi.org/10.1049/el:19921490
Abstract
Piezoelectric ZnO films on glass substrate were deposited by an RF mode ECR sputtering system. It was confirmed that in the ZnO films deposited by this system, a smooth sidewall structure of ZnO film without coarse columnar (fibre) grains was observed and that driving a 1.1 GHz fundamental mode of a Rayleigh SAW on ZnO/IDT/glass structure was possible at λ = 2.4 μm.Keywords
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