Anomalous Optical and Structural Properties of B-Doped a-Si:H
- 1 December 1982
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 21 (12A) , L789
- https://doi.org/10.1143/jjap.21.l789
Abstract
The optical absorption edge spectra, the bonded H content and H evolution measurements have been carried out on B-doped a-Si:H as functions of the dopant gas ratio of B2H6/SiH4. The number of H atoms bonded to Si network decreases as the doping ratio increases, while non-bonded H's are involved only in the heavily B-doped specimen. It has been demonstrated that the film texture changes drastically in a high doping region, resulting in anomalous change in the optical absorption spectra over a whole photon-energy range.Keywords
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