Microalloy layer formation by ion implantation

• 15 October 1979
• journal article
• abstracts
• Published by Elsevier in Thin Solid Films
• Vol. 63  (1) , 1-2
• https://doi.org/10.1016/0040-6090(79)90089-0

Abstract

Keywords

• ION IMPLANTATION
• MICROALLOY LAYER FORMATION
• FORMATION BY ION