Microstructure Fabrication in Electronic Devices

• 1 August 1981
• journal article
• Published by Annual Reviews in Annual Review of Materials Science
• Vol. 11  (1) , 321-351
• https://doi.org/10.1146/annurev.ms.11.080181.001541

Abstract

Keywords

• INTEGRATED CIRCUIT
• MICROSTRUCTURES
• ION IMPLANTATION