Low voltage alternative for electron beam lithography

• 1 November 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (6) , 3094-3098
• https://doi.org/10.1116/1.585935

Abstract

Keywords

• BEAM LITHOGRAPHY
• LOW VOLTAGE ALTERNATIVE
• ELECTRON BEAM