Integrated ferroelectric microelectromechanical systems (MEMS)
- 1 February 1995
- journal article
- research article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 7 (1-4) , 359-370
- https://doi.org/10.1080/10584589508220246
Abstract
A ferroelectric test chip has been fabricated consisting of 1) piezoelectric (PZT) microsensors (accelerometers), 2) low-voltage, 3-μm, n-well CMOS signal conditioning electronics, 3) high-voltage (HVMOS) drive electronics, and 4) PZT microactuator diaphragms and cantilevers. This test chip has been developed to address processing problems encountered in the fabrication of integrated ferroelectric microelectromechanical systems (FMEMS). A description fabrication, IC-compatible process integration, electrical performance of diagnostic MEMS circuits and devices is presented.Keywords
This publication has 1 reference indexed in Scilit:
- Smart sensors: when and where?Sensors and Actuators, 1985