CMOS-Integrated 40GHz Germanium Waveguide Photodetector for On-chip Optical Interconnects
- 1 January 2009
- proceedings article
- Published by Optica Publishing Group
Abstract
Compact (0.7µmx20µm) germanium waveguide photodetector operating at 40Gbps is demonstrated. Monolithic integration of high-quality Ge-on-insulator single-crystalline layer into CMOS stack was achieved by lateral seeded crystallization during CMOS wells activation anneal above germanium melting temperature.Keywords
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