Micromirror arrays using KOH:H2O micromachining of silicon for lens templates, geodesic lenses, and other applications
- 1 November 1994
- journal article
- Published by SPIE-Intl Soc Optical Eng in Optical Engineering
- Vol. 33 (11) , 3578-3588
- https://doi.org/10.1117/12.179881
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: