The Lithographic Process: The Physics

• 3 May 1983
• book chapter
• Published by American Chemical Society (ACS)
• p. 15-85
• https://doi.org/10.1021/bk-1983-0219.ch002

Abstract

Keywords

• LITHOGRAPHIC PROCESS
• CHAPTER
• CIRCUIT
• SUBSTRATE
• DELINEATION
• PROCESSES
• RESIST
• PATTERN
• PHYSICAL LIMITATIONS