Abstract
Plasma-polymerized tetrafluoroethylene (PPTFE) deposits were characterized by contact angle measurements and critical surface tension γCmeasurements. The measurements showed surface property changes of the deposits as a function of time and treatments: helium and nitrogen in the feed gas, plasma degradation of the films, and of vacuum/temperature posttreatments. The process was a flow rf plasma vapor deposition process, inductively-coupled, using tetrafluoroethylene as the monomer gas. The study aimed toward effecting variable surface properties of the film deposits via plasma process parameters and gas feed admixtures. In addition, the nature and structure of the fluorocarbon deposits were elucidated using surface property characterization and ESCA techniques.

This publication has 5 references indexed in Scilit: