Integrated Optic Accelerometer Employing a Cantilever on a Silicon Substrate
- 1 February 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (2R) , 287-288
- https://doi.org/10.1143/jjap.28.287
Abstract
A novel integrated optic accelerometer employing a cantilever on a silicon substrate is proposed. An analysis is carried out to demonstrate the feasibility of the proposed sensor and obtain the basic design concept. The sensitivity and the detectable frequency range of the acceleration can be set by proper selection of the cantilever dimensions and the added weight.Keywords
This publication has 3 references indexed in Scilit:
- Integrated-optic fluid sensor using heat transferApplied Optics, 1988
- Optical-waveguide microdisplacement sensorElectronics Letters, 1982
- Silicon as a mechanical materialProceedings of the IEEE, 1982