The Effect of Hydrolysis Conditions on the Characteristics of PbTiO3 Gels and Thin Films
- 1 January 1986
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
Sol-gel processing represents a promising method of fabrication for thin films of electronic ceramics which are useful in a number of packaging and device applications. In this study, the influence of acid and base catalysts on the structure of PbTiO3 gels and films (0.1-1.0μm) was investigated, for the purpose of inducing and identifying gel structures which were the most suitable as precursors for thin dielectric layers. Continuous, crack-free films, with dielectric strengths in excess of 106 V/cm were developed. Basic solutions gelled rapidly, phase separated, and were probably more crosslinked than acidic gels. Acidic gels seemed more capable of polymeric rearrangement during drying, yielding denser amorphous structures with microcrystalline regions. High-field dielectric constants (1 MV/m ac) in the range K=30–40, and K=160–170, were determined for amorphous and crystalline films, respectively.Keywords
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