X-Ray Silicon Target Preparation for X-Ray Lithographic System

• 1 October 1979
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 18  (10) , 2021-2022
• https://doi.org/10.1143/jjap.18.2021

Abstract

Keywords

• RAY LITHOGRAPHIC
• TARGET PREPARATION
• LITHOGRAPHIC SYSTEM
• SILICON TARGET
• X RAY SILICON