Silicon optical waveguides with buried-CoSi_2 cladding layers
- 1 September 1994
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 19 (17) , 1319-1321
- https://doi.org/10.1364/ol.19.001319
Abstract
We report a new Si waveguide that has a buried, metallike cladding. Infrared light propagates in a crystal Si layer atop a 50-nm film of buried CoSi2 formed by implantation. Experiments in a 20-μm Si structure at the 1.3-μm wavelength show propagation losses below 2.5 dB/cm for TE0 and TM0. Results agree with theory. We also constructed two vertically integrated Si slab waveguides bounded below by CoSi2 cladding layers.Keywords
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