Accurate calculations of double-aperture electrostatic immersion lenses

• 1 February 1969
• journal article
• Published by IOP Publishing in Journal of Physics E: Scientific Instruments
• Vol. 2  (2) , 165-169
• https://doi.org/10.1088/0022-3735/2/2/311

Abstract

Keywords

• ACCURATE CALCULATIONS
• ELECTROSTATIC IMMERSION
• DOUBLE APERTURE
• IMMERSION LENSES
• APERTURE ELECTROSTATIC