Pressure measurement by GaAs piezoelectric sensors

• 24 May 1990
• journal article
• Published by Institution of Engineering and Technology (IET) in Electronics Letters
• Vol. 26  (11) , 693-694
• https://doi.org/10.1049/el:19900452

Abstract

Keywords

• PIEZOELECTRIC EFFECT
• MONOLITHIC INTEGRATION
• TEMPERATURES
• PRESSURES
• MONOLITHIC SENSOR WITH ELECTRONICS 〈111〉GAAS
• GAAS PIEZOELECTRIC SENSORS
• 0 TO 200 C
• SEMICONDUCTORS
• SEMIINSULATING GAAS
• 0 TO 100 BAR
• PRESSURE SENSOR