Correlation of in-plane and out-of-plane distortion in x-ray lithography masks

• 1 November 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (6) , 3169-3172
• https://doi.org/10.1116/1.585905

Abstract

Keywords

• PLANE DISTORTION
• X RAY LITHOGRAPHY
• RAY LITHOGRAPHY MASKS
• DISTORTION IN X