Determination of boron and phosphorus in borophosphosilicate thin films on silicon substrates by capillary electrophoresis
- 15 September 1992
- journal article
- research article
- Published by American Chemical Society (ACS) in Analytical Chemistry
- Vol. 64 (18) , 2123-2129
- https://doi.org/10.1021/ac00042a017
Abstract
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