Microstructure of gold grown by ion-induced deposition
- 1 March 1995
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 258 (1-2) , 333-335
- https://doi.org/10.1016/0040-6090(94)06399-0
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Focused ion beam induced deposition of tungsten on vertical sidewallsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- The role of the ion-solid interaction in ion-beam-induced deposition of goldJournal of Applied Physics, 1991
- Focused ion beam induced deposition of platinumJournal of Vacuum Science & Technology B, 1990
- Focused ion beam induced deposition of low-resistivity gold filmsJournal of Vacuum Science & Technology B, 1989
- Focused ion beam fabrication of submicron gold structuresJournal of Vacuum Science & Technology B, 1989