Preparation of LiNbO3 Thin Films by Metal-Organic Chemical Vapor Deposition.

• 1 January 1993
• journal article
• Published by The Chemical Society of Japan in NIPPON KAGAKU KAISHI
• No. 7,p. 831-836
• https://doi.org/10.1246/nikkashi.1993.831

Abstract

Keywords

• DEPOSITION
• LINBO3 THIN FILMS
• METAL ORGANIC CHEMICAL
• ORGANIC CHEMICAL VAPOR
• FILMS BY METAL