Large diameter ion beam implantation system

• 1 January 1987
• journal article
• Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
• Vol. 21  (1) , 314-316
• https://doi.org/10.1016/0168-583x(87)90848-2

Abstract

Keywords

• ION BEAM
• BEAM IMPLANTATION
• IMPLANTATION SYSTEM
• LARGE DIAMETER ION