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Seeded lateral epitaxial SOI using
Home
Publications
Seeded lateral epitaxial SOI using
Seeded lateral epitaxial SOI using
MM
M. Maekawa
M. Maekawa
KS
K. Shirakawa
K. Shirakawa
TS
T. Shinozaki
T. Shinozaki
KO
K. Ohtake
K. Ohtake
MK
M. Koba
M. Koba
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13 January 2003
conference paper
Published by
Institute of Electrical and Electronics Engineers (IEEE)
https://doi.org/10.1109/soi.1989.69795
Abstract
No abstract available
Cited
Cited by 2 articles
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