Micro electrostatic actuator with three degrees of freedom
- 4 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The wobble motor: an electrostatic, planetary-armature, microactuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Creature recognition and identification by image processing based on expert systemPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Prototype of micro ISFET for biomedical researchElectronics and Communications in Japan (Part II: Electronics), 1986