On-chip vacuum microtriode using carbon nanotube field emitters
- 13 May 2002
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 80 (20) , 3820-3822
- https://doi.org/10.1063/1.1480884
Abstract
We show a fully integrated, on-chip, vacuum microtriode fabricated via silicon micromachining processes using carbon nanotubes as field emitters. The triode is constructed laterally on a silicon surface using microelectromechanical systems (MEMS) design and fabrication principles. The technique incorporates high-performance nanomaterials in a MEMS design with mature solid-state fabrication technology to create miniaturized, on-chip power amplifying vacuum devices, which could have important and far-reaching scientific and technological implications.Keywords
This publication has 16 references indexed in Scilit:
- Large current density from carbon nanotube field emittersApplied Physics Letters, 1999
- Microwave triode amplifiers from 1 to 2 GHz using molybdenum thin-film-field-emission cathode devicesIEEE Transactions on Electron Devices, 1995
- Field-emitter-array development for high-frequency operationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993
- Helical microtubules of graphitic carbonNature, 1991
- Field emission triodesIEEE Transactions on Electron Devices, 1991
- A study of field emission microtriodesIEEE Transactions on Electron Devices, 1991
- A wide-bandwidth high-gain small-size distributed amplifier with field-emission triodes (FETRODEs) for the 10 to 300 GHz frequency rangeIEEE Transactions on Electron Devices, 1989
- The application of thin-film field-emission cathodes to electronic tubesApplications of Surface Science, 1979
- Design Factors of the Bell Telephone Laboratories 1553 TriodeBell System Technical Journal, 1950
- Electron emission in intense electric fieldsProceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character, 1928