fabrication of diamond membranes for MEMS using reactive ion etching of silicon
- 1 September 1998
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 330 (2) , 62-66
- https://doi.org/10.1016/s0040-6090(98)00825-6
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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