Ultrahigh Speed Electron Beam Pulsing Systems For Electron Beam Testing

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Abstract
Measurement of high speed waveforms within operating integrated circuits presents a major challenge to design engineers. Electron beam testing techniques are well suited to the task due to their essentially non-loading properties. A number of such systems are briefly reviewed and their properties and drawbacks outlined. In addition, a recently developed system is described which overcomes some of the difficulties encountered with previous implementations.

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