MEMS micro-valve for space applications

• 1 May 2000
• journal article
• Published by Elsevier in Sensors and Actuators A: Physical
• Vol. 83  (1-3) , 188-193
• https://doi.org/10.1016/s0924-4247(99)00382-9

Abstract

Keywords

• SPACE APPLICATIONS
• MEMS MICRO VALVE
• VALVE FOR SPACE