Deposition of Silicon Nitride Films by the Silane-Hydrazine Process

• 1 January 1967
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 114  (9) , 962
• https://doi.org/10.1149/1.2426791

Abstract

Keywords

• SILICON NITRIDE
• DEPOSITION
• NITRIDE FILMS
• SILANE HYDRAZINE PROCESS