Deposition of In2O3 : Sn Film on Large Substrate

• 1 January 1976
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 19  (1) , 13-19
• https://doi.org/10.3131/jvsj.19.13

Abstract

Keywords

• LARGE SUBSTRATE
• SN FILM
• DEPOSITION OF IN2O3
• FILM ON LARGE