Highly conductive and transparent amorphous tin oxide

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Abstract
The physical properties of chemically sprayed tin oxide films have been investigated. The optical and transport behavior of both amorphous and polycrystalline material depends on the reaction temperature. Amorphous films deposited at very low temperatures (Ts=220 °C) possess a conductivity as high as that of the polycrystalline layers. Hall effect measurements and compositional analyses of those amorphous films show that nonintentional chlorine doping is responsible for the increased conductivity. Optical transmission in the visible region of the spectrum is almost as good in amorphous as in polycrystalline material. An antireflecting coating of amorphous tin oxide with an optical gain of 40% has been achieved on silicon wafers. Furthermore, film thickness homogeneity broadens the field of application to various optoelectronic devices.