Epitaxial Silicon Growth Between Scylla and Charybdis

• 1 August 2000
• journal article
• research article
• Published by Wiley in Chemical Vapor Deposition
• Vol. 6  (4) , 206-214
• https://doi.org/10.1002/1521-3862(200008)6:4<206::aid-cvde206>3.0.co;2-9

Abstract

Keywords

• CRYSTALLIZATION
• EPITAXIAL GROWTH
• SILICON
• TERRACE STEP CRYSTAL GROWTH