A Controlled Method Of Preparing Plan-View Silicon Samples For Transmission Electron Microscopy Studies
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
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This publication has 1 reference indexed in Scilit:
- Analytical techniques for thin filmsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989