Electron probe microanalysis of metal oxides: comparison of correction methods

Abstract
Several metal oxides have been analysed under constant time conditions, using pure metal standards. A vacuum-deposited coating of copper (100 Å thick) prevented electrostatic charging of the specimens and reduced heating effects. Eight different methods for applying absorption and atomic number corrections have been evaluated. A method due to Duncumb and co-workers is found to give the best results, the relative error in the analysis being in general less than 5 per cent.

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