Ultrasensitive nanoelectromechanical mass detection
Top Cited Papers
- 31 May 2004
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 84 (22) , 4469-4471
- https://doi.org/10.1063/1.1755417
Abstract
We describe the application of nanoelectromechanical systems (NEMS) to ultrasensitive mass detection. In these experiments, a modulated flux of atoms was adsorbed upon the surface of a 32.8 MHz NEMS resonator within an ultrahigh vacuum environment. The mass-induced resonance frequency shifts by these adsorbates were then measured to ascertain a mass sensitivity of 2.53x10^-18 g. In these initial measurements, this sensitivity is limited by the noise in the NEMS displacement transducer; the ultimate, limits of the technique are set by fundamental phase noise processes. Our results and analysis indicate that mass sensing of individual molecules will be realizable with optimized NEMS devices.Keywords
All Related Versions
This publication has 12 references indexed in Scilit:
- Femtogram mass detection using photothermally actuated nanomechanical resonatorsApplied Physics Letters, 2003
- Mass sensing of adsorbed molecules in sub-picogram sample with ultrathin silicon resonatorReview of Scientific Instruments, 2003
- Balanced electronic detection of displacement in nanoelectromechanical systemsApplied Physics Letters, 2002
- Nanoelectromechanical systems face the futurePhysics World, 2001
- Mechanical resonant immunospecific biological detectorApplied Physics Letters, 2000
- Thickness dependence of the morphology of ultrathin quench condensed gold filmsPhysical Review B, 1998
- Use of the quartz crystal microbalance to measure the mass of submonolayer deposits: Measuring the stoichiometry of surface oxidesJournal of Vacuum Science & Technology A, 1998
- Direct thermal conductance measurements on suspended monocrystalline nanostructuresApplied Physics Letters, 1997
- Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystalsApplied Physics Letters, 1996
- Detection of mercury vapor using resonating microcantileversApplied Physics Letters, 1995