Micromechanical relay with electrostatic actuation and metallic contacts

• 30 November 1999
• journal article
• Published by IOP Publishing in Journal of Micromechanics and Microengineering
• Vol. 9  (4) , 324-331
• https://doi.org/10.1088/0960-1317/9/4/307

Abstract

Keywords

• CONTACT RESISTANCE
• NICKEL