An Electrical Test Structure For Measuring Contact Size
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
First Page of the Article Author(s) Freeman, G. Stanford University Lukaszek, W.Keywords
This publication has 2 references indexed in Scilit:
- Integrated electrical vernier to measure registration accuracyIEEE Electron Device Letters, 1986
- Bridge and van der Pauw Sheet Resistors for Characterizing the Line Width of Conducting LayersJournal of the Electrochemical Society, 1978