Influence of the oxygen stoichiometry on the structural and optical properties of reactively evaporated ZrOx films
- 11 October 1993
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 63 (15) , 2056-2058
- https://doi.org/10.1063/1.110590
Abstract
Thin ZrOx films are deposited by reactive electron beam evaporation of pure zirconium metal at different oxygen partial pressures. Stoichiometry, structural composition and optical properties of these films are studied. Results from x‐ray diffraction and ellipsometry show that the crystallographic phase composition and the optical properties of the films can be controlled by a proper choice of the oxygen partial pressure. In comparison with direct evaporation of ZrO2, the reactive evaporation of zirconium metal improves the homogeneity of the refractive index along the film thickness thanks to an increased homogeneity in the crystallographic phase composition.Keywords
This publication has 5 references indexed in Scilit:
- Proton resonant scattering for oxygen stoichiometry of reactively evaporated ZrO2−x filmsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
- Structure-related bulk losses in ZrO2 optical thin filmsThin Solid Films, 1990
- Inhomogeneity and Microstructure in e-Beam Evaporated ZrO2 FilmsMRS Proceedings, 1990
- The O−Zr (Oxygen-Zirconium) systemBulletin of Alloy Phase Diagrams, 1986
- Optical and crystalline inhomogeneity in evaporated zirconia filmsApplied Optics, 1985