Implantation with ion pulses
- 16 April 1986
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 94 (2) , 855-858
- https://doi.org/10.1002/pssa.2210940255
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Rapid surface melting of CU60Zr40 metallic glassJournal of Materials Science Letters, 1984
- Epitaxial NiSi2 formation by pulsed ion beam annealingApplied Physics Letters, 1982
- Ion beam annealing of semiconductorsApplied Physics Letters, 1980
- Intense lithium, boron, and carbon beams from a magnetically insulated diodeApplied Physics Letters, 1980