High-accuracy tuning of planar millimeter-wave circuits by laser photochemical etching

1 March 1987

journal article
Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters

Vol. 8 (3) , 110-112
https://doi.org/10.1109/edl.1987.26569

Abstract

A new laser photochemical reaction for etching of molybdenum has been applied to the in situ tuning of coplanar waveguide (CPW) structures used in millimeter wave integrated circuits. Tests on structures operating at 33 GHz have confirmed low insertion losses and demonstrated an improvement in set accuracy by a factor of 10-30 relative to previously developed strip or solder tuners.

Keywords

LASER TUNING
CIRCUIT OPTIMIZATION
MILLIMETER WAVE CIRCUITS
PHOTOCHEMISTRY
ETCHING
WAVEGUIDE LASERS
COPLANAR WAVEGUIDES
MILLIMETER WAVE INTEGRATED CIRCUITS
CIRCUIT TESTING
INSERTION LOSS

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