Quadrupole mass spectrometric study of positive ions from RF plasmas of pure CH4, CH4/H2, and CH4/Ar systems
- 1 December 1991
- journal article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 11 (4) , 473-488
- https://doi.org/10.1007/bf01447160
Abstract
No abstract availableKeywords
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