Submicrometer periodicity gratings as artificial anisotropic dielectrics
- 15 March 1983
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 42 (6) , 492-494
- https://doi.org/10.1063/1.93979
Abstract
Gratings of dielectric material can act as homogeneous birefringent materials if the wavelength of the incident radiation is greater than twice the period of the grating. For the case of square profile gratings, simple equations predict the birefringence versus linewidth-to-period ratio of the gratings. By using x-ray lithography and reactive ion etching, 240-nm period gratings of polymethylmethacrylate and silicon nitride were fabricated with various linewidths. The birefringence of these was measured at 632.8 nm and found to agree closely with the theory. Silicon nitride gratings which act as half-wave and quarter-wave plates in the visible were made.Keywords
This publication has 6 references indexed in Scilit:
- Generalized Model For Wire Grid PolarizersPublished by SPIE-Intl Soc Optical Eng ,1982
- Application of ≊100 Å linewidth structures fabricated by shadowing techniquesJournal of Vacuum Science and Technology, 1981
- Ultraviolet grating polarizersJournal of Vacuum Science and Technology, 1981
- Silicon Nitride Single-Layer X-Ray MaskJapanese Journal of Applied Physics, 1981
- X-ray lithography at ∠100 Å linewidths using x-ray masks fabricated by shadowing techniquesJournal of Vacuum Science and Technology, 1979
- Electromagnetic propagation in periodic stratified media II Birefringence, phase matching, and x-ray lasers *Journal of the Optical Society of America, 1977