Some applications of triode sputtering to integrated circuits

• 1 May 1967
• journal article
• Published by Elsevier in Vacuum
• Vol. 17  (5) , 261-264
• https://doi.org/10.1016/0042-207x(67)90837-8

Abstract

Keywords

• INTEGRATED CIRCUITS
• APPLICATIONS OF TRIODE
• TRIODE SPUTTERING TO INTEGRATED