Effects of Phosphorus Diffusions in Epitaxial Silicon Layers

• 1 January 1968
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 115  (4) , 409
• https://doi.org/10.1149/1.2411234

Abstract

Keywords

• SILICON LAYERS
• EPITAXIAL SILICON
• PHOSPHORUS DIFFUSIONS
• EFFECTS OF PHOSPHORUS