Pulsed plasma polymerization of pentafluorostyrene: Synthesis of low dielectric constant films
- 1 July 1998
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 84 (1) , 439-444
- https://doi.org/10.1063/1.368046
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
- Comparison of Pulsed and Continuous-Wave Deposition of Thin Films from Saturated Fluorocarbon/H2 Inductively Coupled rf PlasmasChemistry of Materials, 1997
- Pulsed Plasma Polymerization of Tetramethyltin: Nanoscale Compositional Control of Film ChemistryChemistry of Materials, 1996
- Effect of series resistance on the forward current-voltage characteristics of Schottky diodes in the presence of interfacial layerSolid-State Electronics, 1996
- Pulsed Plasma Polymerization of Maleic AnhydrideChemistry of Materials, 1996
- Pulsed Radio Frequency Plasma Polymerization of Allyl Alcohol: Controlled Deposition of Surface Hydroxyl GroupsLangmuir, 1996
- Plasma Synthesis of a Novel CF3-Dominated Fluorocarbon FilmChemistry of Materials, 1996
- Spectroscopic Characterization of Films Obtained in Pulsed Radio-Frequency Plasma Discharges of Fluorocarbon MonomersPublished by American Chemical Society (ACS) ,1993
- Molecular control of surface film compositions via pulsed radio-frequency plasma deposition of perfluoropropylene oxideChemistry of Materials, 1991