Fabrication techniques for microdevices in soft superconductors
- 1 October 1978
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 49 (10) , 1452
- https://doi.org/10.1063/1.1135286
Abstract
Fabrication techniques for devices having dimensions of about a micrometer are presented. A versatile low-cost photolithographic microscope projection technique and chemical etching are used as part of the fabrication process. The whole procedure is proposed as an alternative to razor blade or diamond scratching techniques in laboratory research at low temperatures. A detailed description of the equipment and methods is given. Specific examples of one material devices and two material devices are described in connection with physical problems of recent interest. The broad field of application of the techniques shown make them appropriate for creating structures that might have defined and reproducible forms from millimeter dimensions down to 0.5 microm.Keywords
This publication has 6 references indexed in Scilit:
- Thermal effects in superconducting proximity-effect bridgesJournal of Applied Physics, 1977
- Neutron powder profile studies of the gamma uranium trioxide phasesJournal of Solid State Chemistry, 1977
- Voltage locking in two coupled microbridge Josephson junctionsIEEE Transactions on Magnetics, 1977
- Comparative studies of ion-implant Josephson-effect structuresIEEE Transactions on Magnetics, 1977
- Phase-slip centers and nonequilibrium processes in superconducting tin microbridgesJournal of Low Temperature Physics, 1974
- Microscopic circuit fabrication on refractory superconducting filmsReview of Scientific Instruments, 1973