High resolution e-beam lithography for X-ray mask making

• 31 December 1987
• journal article
• Published by Elsevier in Microelectronic Engineering
• Vol. 6  (1-4) , 123-128
• https://doi.org/10.1016/0167-9317(87)90026-8

Abstract

Keywords

• MASK MAKING
• HIGH RESOLUTION
• BEAM LITHOGRAPHY
• RAY MASK