The thermal conductivity of CVD diamond films
- 15 February 1993
- journal article
- Published by The Royal Society in Philosophical Transactions A
- Vol. 342 (1664) , 245-251
- https://doi.org/10.1098/rsta.1993.0018
Abstract
The thermal conductivity of chemical vapour deposition diamond films is controlled by the microstructure, impurity content and carbon double bonds in the films. In high conductivity films, dislocation scattering is dominant at low temperatures, while phonon-phonon scattering limits the conductivity at room temperature. In lower quality films, hydrogen and metal impurities as well as carbon double bonds constrain the conductivity up to room temperature. Significant anisotropies and gradients in the thermal conductivity exist in some films because of their micro structure.Keywords
This publication has 11 references indexed in Scilit:
- Hot-filament-grown diamond films on Si: characterization of impuritiesDiamond and Related Materials, 1992
- Properties of diamond with varying isotopic compositionDiamond and Related Materials, 1992
- Lattice dynamics and Raman spectra of isotopically mixed diamondPhysical Review B, 1992
- Unusually high thermal conductivity in diamond filmsApplied Physics Letters, 1992
- Thermal conductivity of isotopically enriched diamondsPhysical Review B, 1992
- Isotopic dependence of the lattice constant of diamondPhysical Review B, 1991
- Thermal conductivity of diamond filmsJournal of Applied Physics, 1991
- On the thermal conductivity of diamond under changes to its isotopic characterZeitschrift für Physik B Condensed Matter, 1991
- Thermal diffusivity of isotopically enricheddiamondPhysical Review B, 1990
- Thermal Conductivity and Lattice Vibrational ModesPublished by Elsevier ,1958