Glass Flow Mechanism of Phosphosilicate Glass and Its Application in MOS Devices

• 1 January 1977
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 16  (S1) , 73
• https://doi.org/10.7567/jjaps.16s1.73

Abstract

Keywords

• PHOSPHOSILICATE GLASS
• MOS DEVICES
• GLASS FLOW MECHANISM
• APPLICATION