Acid-catalyzed silanol condensation reaction mechanism in a chemical amplification negative resist system.
- 1 January 1990
- journal article
- Published by Technical Association of Photopolymers, Japan in Journal of Photopolymer Science and Technology
- Vol. 3 (3) , 385-388
- https://doi.org/10.2494/photopolymer.3.385
Abstract
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